EEPW论坛

PV电池材料的电阻率可以采用四针探测的方式³，通过加载电流源并测量电压进行测量，其中可以采用四点共线探测技术或者范德堡方法。

The resistivity of the PV cell material can be determined by means of sourcing current and measuring voltage using a four-probe approach,[1] either the four-point collinear probe technique or the van der Pauw method.

在使用四点共线探测技术[2]进行测量时，其中两个探针用于连接电流源，另两个探针用于测量光伏材料上电压降。在已知PV材料厚度的情况下，体积电阻率（ρ）可以根据下列公式计算得到：

For making measurements using a four-point collinear probe, two probes are used to connect the current source and two probes are used to measure the voltage drop across the photovoltaic material. When the thickness of the PV material is known, the volume resistivity (ρ) can be calculated as

ρ = (π/ln2)(V/I)(tk)

其中，ρ =体积电阻率，单位是Ωcm，V=测得的电压，单位是V，I=源电流，单位是A，t=样本厚度，单位是cm，k=校正系数，取决于探针与晶圆直径的比例以及晶圆厚度与探针间距的比例。

where ρ = the volume resistivity in Ohms-cm, V = the measured voltage in V, I = the source current in A, t = the sample thickness in cm, k = a correction factor based on the ratio of the probe to the wafer diameter and on the ratio of wafer thickness to probe separation

[1] 吉时利仪器公司“基于4200-SCS的四针电阻率和霍尔电压的测量”，2475号应用笔记， www.keithley.com.

[2]半导体器件实验室 http://www.keithley.com.cn/re/sdl